Inventor
HU ALBERT
US6 patents
⚠️ This page may combine multiple inventors who share the name “HU ALBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APLEX INC
3 patentsUS6059643AMay 9, 2000
Apparatus and method for polishing a flat surface using a belted polishing pad
APLEX INC297 citations95
US5957764ASep 28, 1999
Modular wafer polishing apparatus and method
APLEX INC25 citations89
US6146249ANov 14, 2000
Apparatus and method for polishing a flat surface using a belted polishing pad
APLEX INC6 citations69