Inventor
SUNDAR SATISH
US30 patents
⚠️ This page may combine multiple inventors who share the name “SUNDAR SATISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
19 patentsUS6224312B1May 1, 2001
Optimal trajectory robot motion
APPLIED MATERIALS INC86 citations98
US6198976B1Mar 6, 2001
On the fly center-finding during substrate handling in a processing system
APPLIED MATERIALS INC145 citations98
US6082950AJul 4, 2000
Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding
APPLIED MATERIALS INC154 citations97
US5838121ANov 17, 1998
Dual blade robot
APPLIED MATERIALS INC112 citations97
US6327517B1Dec 4, 2001
Apparatus for on-the-fly center finding and notch aligning for wafer handling robots
APPLIED MATERIALS INC73 citations96
US6322312B1Nov 27, 2001
Mechanical gripper for wafer handling robots
APPLIED MATERIALS INC66 citations96
US6155773ADec 5, 2000
Substrate clamping apparatus
APPLIED MATERIALS INC64 citations95
US7813832B2Oct 12, 2010
Method for on the fly positioning and continuous monitoring of a substrate in a chamber
APPLIED MATERIALS INC51 citations94
US6283701B1Sep 4, 2001
Pneumatically actuated flexure gripper for wafer handling robots
APPLIED MATERIALS INC83 citations93
US6856863B1Feb 15, 2005
Method and apparatus for automatic calibration of robots
APPLIED MATERIALS INC51 citations92
US6514033B2Feb 4, 2003
Mechanical gripper for wafer handling robots
APPLIED MATERIALS INC27 citations92
US5905302AMay 18, 1999
Loadlock cassette with wafer support rails
APPLIED MATERIALS INC48 citations92
US6685422B2Feb 3, 2004
Pneumatically actuated flexure gripper for wafer handling robots
APPLIED MATERIALS INC49 citations91
US7695232B2Apr 13, 2010
Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
APPLIED MATERIALS INC17 citations90
US7107125B2Sep 12, 2006
Method and apparatus for monitoring the position of a semiconductor processing robot
APPLIED MATERIALS INC19 citations90
US7527694B2May 5, 2009
Substrate gripping apparatus
APPLIED MATERIALS INC9 citations84
US7226269B2Jun 5, 2007
Substrate edge grip apparatus
APPLIED MATERIALS INC10 citations84
US9812344B2Nov 7, 2017
Wafer processing system with chuck assembly maintenance module
APPLIED MATERIALS INC3 citations69
US7997851B2Aug 16, 2011
Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
APPLIED MATERIALS INC5 citations60
SUNDAR SATISH
5 patentsUS8147448B2Apr 3, 2012
High precision infusion pumps
SUNDAR SATISH160 citations98
US8147447B2Apr 3, 2012
High precision infusion pump controller
SUNDAR SATISH65 citations97
US8197443B2Jun 12, 2012
Detection apparatus and method
SUNDAR SATISH41 citations93
US8137312B2Mar 20, 2012
Detection apparatus and method
SUNDAR SATISH31 citations92
US8599531B2Dec 3, 2013
Electrostatic end effector apparatus, systems and methods
SUNDAR SATISH15 citations80
DESTINATION 2D INC
3 patentsUS11976369B2May 7, 2024
Low-temperature/BEOL-compatible highly scalable graphene synthesis tool
DESTINATION 2D INC7 citations82
US12281388B2Apr 22, 2025
Low-temperature/beol-compatible highly scalable graphene synthesis tool
DESTINATION 2D INC1 citations60
US12286710B2Apr 29, 2025
Methods of low-temperature/BEOL-compatible highly scalable graphene synthesis
DESTINATION 2D INC0 citations59