Inventor
SUBRAHMANYAM KOMMISETTI
SG4 patents
Patents
4 patentsUS9697470B2Jul 4, 2017
Apparatus and method for integrating manual and automated techniques for automated correlation in data mining
APPLIED MATERIALS INC3 citations69
US10283421B2May 7, 2019
System to detect wafer arcing in semiconductor manufacturing equipment
APPLIED MATERIALS INC2 citations68
US9508612B2Nov 29, 2016
Method to detect wafer arcing in semiconductor manufacturing equipment
APPLIED MATERIALS INC2 citations58
US9429247B2Aug 30, 2016
Acoustically-monitored semiconductor substrate processing systems and methods
APPLIED MATERIALS INC0 citations50