Inventor
WESTENDORP JOHANNES F M
US7 patents
⚠️ This page may combine multiple inventors who share the name “WESTENDORP JOHANNES F M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS6410433B1Jun 25, 2002
Thermal CVD of TaN films from tantalum halide precursors
TOKYO ELECTRON LTD374 citations98
US6265311B1Jul 24, 2001
PECVD of TaN films from tantalum halide precursors
TOKYO ELECTRON LTD419 citations98
US6268288B1Jul 31, 2001
Plasma treated thermal CVD of TaN films from tantalum halide precursors
TOKYO ELECTRON LTD109 citations97
US6410432B1Jun 25, 2002
CVD of integrated Ta and TaNx films from tantalum halide precursors
TOKYO ELECTRON LTD36 citations92
US6413860B1Jul 2, 2002
PECVD of Ta films from tanatalum halide precursors
TOKYO ELECTRON LTD11 citations73
US6900129B2May 31, 2005
CVD of tantalum and tantalum nitride films from tantalum halide precursors
TOKYO ELECTRON LTD2 citations62