Inventor
OGATA NOBUHITO
JP3 patents
Patents
3 patentsUS6313539B1Nov 6, 2001
Semiconductor memory device and production method of the same
SHARP KK53 citations95
US6608383B2Aug 19, 2003
Semiconductor device including capacitor with lower electrode including iridium and iridium oxide layers
SHARP KK26 citations92
US6232174B1May 15, 2001
Methods for fabricating a semiconductor memory device including flattening of a capacitor dielectric film
SHARP KK21 citations92