Inventor

DEEGAN MERVYN

US2 patents

Patents

2 patents

US11450504B2Sep 20, 2022

GeH4/Ar plasma chemistry for ion implant productivity enhancement

APPLIED MATERIALS INC0 citations54

US10923309B2Feb 16, 2021

GeH4/Ar plasma chemistry for ion implant productivity enhancement

APPLIED MATERIALS INC0 citations54