Inventor

VAN HEIJNSBERGEN DENIZ

US2 patents

Patents

2 patents

US11347154B2May 31, 2022

Cleaning a structure surface in an EUV chamber

ASML NETHERLANDS BV3 citations70

US12189313B2Jan 7, 2025

Cleaning a structure surface in an EUV chamber

ASML NETHERLANDS BV0 citations59