Inventor
VISHWANATHAN ARUN
US12 patents
⚠️ This page may combine multiple inventors who share the name “VISHWANATHAN ARUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RODEL INC
5 patentsUS6454634B1Sep 24, 2002
Polishing pads for chemical mechanical planarization
RODEL INC123 citations98
US6749485B1Jun 15, 2004
Hydrolytically stable grooved polishing pads for chemical mechanical planarization
RODEL INC98 citations97
US6736709B1May 18, 2004
Grooved polishing pads for chemical mechanical planarization
RODEL INC96 citations97
US6582283B2Jun 24, 2003
Polishing pads for chemical mechanical planarization
RODEL INC71 citations96
US6361409B1Mar 26, 2002
Polymeric polishing pad having improved surface layer and method of making same
RODEL INC22 citations86