Inventor
VISHNESKY EDWARD J
US6 patents
Patents
6 patentsUS6130453AOct 10, 2000
Flash memory structure with floating gate in vertical trench
IBM150 citations97
US5245206ASep 14, 1993
Capacitors with roughened single crystal plates
IBM47 citations95
US5384152AJan 24, 1995
Method for forming capacitors with roughened single crystal plates
IBM61 citations94
US6541349B2Apr 1, 2003
Shallow trench isolation using non-conformal dielectric and planarizatrion
IBM18 citations79
US6270353B1Aug 7, 2001
Low cost shallow trench isolation using non-conformal dielectric material
IBM16 citations79
US6531265B2Mar 11, 2003
Method to planarize semiconductor surface
IBM9 citations68