Inventor
HUGLIN GRANT S
US4 patents
Patents
4 patentsUS7242057B2Jul 10, 2007
Vertical transistor structures having vertical-surrounding-gates with self-aligned features
MICRON TECHNOLOGY INC17 citations90
US7170174B2Jan 30, 2007
Contact structure and contact liner process
MICRON TECHNOLOGY INC5 citations72
US7524756B2Apr 28, 2009
Process of forming a semiconductor assembly having a contact structure and contact liner
MICRON TECHNOLOGY INC2 citations61
US7488651B2Feb 10, 2009
Method of making vertical transistor structures having vertical-surrounding-gates with self-aligned features
MICRON TECHNOLOGY INC3 citations60