Inventor
SUMAN SHISHIR
IN4 patents
Patents
4 patentsUS10365232B2Jul 30, 2019
High accuracy of relative defect locations for repeater analysis
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US10600175B2Mar 24, 2020
Dynamic care areas for defect detection
KLA TENCOR CORP4 citations70
US11067516B2Jul 20, 2021
High accuracy of relative defect locations for repeater analysis
KLA TENCOR CORP1 citations60
US11295432B2Apr 5, 2022
Broad band plasma inspection based on a nuisance map
KLA TENCOR CORP0 citations40