Inventor
HANEY STEVEN J
US10 patents
⚠️ This page may combine multiple inventors who share the name “HANEY STEVEN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUV LLC
8 patentsUS6031598AFeb 29, 2000
Extreme ultraviolet lithography machine
EUV LLC148 citations97
US6333775B1Dec 25, 2001
Extreme-UV lithography vacuum chamber zone seal
EUV LLC82 citations94
US6192897B1Feb 27, 2001
Apparatus and method for in-situ cleaning of resist outgassing windows
EUV LLC26 citations92
US6642995B2Nov 4, 2003
Mask-to-wafer alignment system
EUV LLC7 citations73
US6549264B2Apr 15, 2003
Extreme-UV lithography vacuum chamber zone seal
EUV LLC6 citations71
US6545745B2Apr 8, 2003
Extreme-UV lithography vacuum chamber zone seal
EUV LLC9 citations71
US6328282B1Dec 11, 2001
Motorized support jack
EUV LLC7 citations71
US6561486B2May 13, 2003
Motorized support jack
EUV LLC1 citations50