Inventor
HERRON DONALD JOE
US5 patents
Patents
5 patentsUS6333775B1Dec 25, 2001
Extreme-UV lithography vacuum chamber zone seal
EUV LLC82 citations94
US6549264B2Apr 15, 2003
Extreme-UV lithography vacuum chamber zone seal
EUV LLC6 citations71
US6545745B2Apr 8, 2003
Extreme-UV lithography vacuum chamber zone seal
EUV LLC9 citations71
US6328282B1Dec 11, 2001
Motorized support jack
EUV LLC7 citations71
US6561486B2May 13, 2003
Motorized support jack
EUV LLC1 citations50