Inventor
KLEBANOFF LEONARD E
US23 patents
⚠️ This page may combine multiple inventors who share the name “KLEBANOFF LEONARD E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUV LLC
16 patentsUS6253464B1Jul 3, 2001
Method for protection of lithographic components from particle contamination
EUV LLC73 citations96
US6153044ANov 28, 2000
Protection of lithographic components from particle contamination
EUV LLC67 citations96
US6492067B1Dec 10, 2002
Removable pellicle for lithographic mask protection and handling
EUV LLC75 citations95
US6333775B1Dec 25, 2001
Extreme-UV lithography vacuum chamber zone seal
EUV LLC82 citations94
US6192897B1Feb 27, 2001
Apparatus and method for in-situ cleaning of resist outgassing windows
EUV LLC26 citations92
US6664554B2Dec 16, 2003
Self-cleaning optic for extreme ultraviolet lithography
EUV LLC36 citations91
US6533952B2Mar 18, 2003
Mitigation of radiation induced surface contamination
EUV LLC20 citations91
US6772776B2Aug 10, 2004
Apparatus for in situ cleaning of carbon contaminated surfaces
EUV LLC23 citations89
US7147722B2Dec 12, 2006
Method for in-situ cleaning of carbon contaminated surfaces
EUV LLC15 citations80
US6231930B1May 15, 2001
Process for producing radiation-induced self-terminating protective coatings on a substrate
EUV LLC10 citations73
US6549264B2Apr 15, 2003
Extreme-UV lithography vacuum chamber zone seal
EUV LLC6 citations71
US6545745B2Apr 8, 2003
Extreme-UV lithography vacuum chamber zone seal
EUV LLC9 citations71
US6989629B1Jan 24, 2006
Method and apparatus for debris mitigation for an electrical discharge source
EUV LLC2 citations62
US6888297B2May 3, 2005
Method and apparatus for debris mitigation for an electrical discharge source
EUV LLC2 citations62
US6279601B1Aug 28, 2001
Liquid zone seal
EUV LLC0 citations52
US7740916B2Jun 22, 2010
Method for the protection of extreme ultraviolet lithography optics
EUV LLC0 citations39
NAT TECH & ENG SOLUTIONS SANDIA LLC
3 patentsUS10000377B1Jun 19, 2018
Nanostructured metal amides and nitrides for hydrogen storage
NAT TECH & ENG SOLUTIONS SANDIA LLC11 citations82
US11192783B1Dec 7, 2021
Ternary borides and borohydrides for hydrogen storage and method of synthesis
NAT TECH & ENG SOLUTIONS SANDIA LLC0 citations61
US12297960B1May 13, 2025
Flow assist vent mast
NAT TECH & ENG SOLUTIONS SANDIA LLC1 citations59
KLA TENCOR CORP
3 patentsUS9389180B2Jul 12, 2016
Methods and apparatus for use with extreme ultraviolet light having contamination protection
KLA TENCOR CORP2 citations60
US9156068B2Oct 13, 2015
Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation
KLA TENCOR CORP0 citations44
US9759912B2Sep 12, 2017
Particle and chemical control using tunnel flow
KLA TENCOR CORP0 citations41