Inventor
REPLOGLE WILLIAM C
US5 patents
Patents
5 patentsUS6333775B1Dec 25, 2001
Extreme-UV lithography vacuum chamber zone seal
EUV LLC82 citations94
US6225027B1May 1, 2001
Extreme-UV lithography system
EUV LLC36 citations91
US6549264B2Apr 15, 2003
Extreme-UV lithography vacuum chamber zone seal
EUV LLC6 citations71
US6545745B2Apr 8, 2003
Extreme-UV lithography vacuum chamber zone seal
EUV LLC9 citations71
US6744493B1Jun 1, 2004
In-vacuum exposure shutter
EUV LLC8 citations69