Inventor
HAZAMA JUNJI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “HAZAMA JUNJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON KOGAKU KK
8 patentsUS4718767AJan 12, 1988
Method of inspecting the pattern on a photographic mask
NIPPON KOGAKU KK37 citations92
US4636626AJan 13, 1987
Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication
NIPPON KOGAKU KK38 citations92
US4589139AMay 13, 1986
Apparatus for detecting defects in pattern
NIPPON KOGAKU KK48 citations92
US4506382AMar 19, 1985
Apparatus for detecting two-dimensional pattern and method for transforming the pattern into binary image
NIPPON KOGAKU KK45 citations92
US4479145AOct 23, 1984
Apparatus for detecting the defect of pattern
NIPPON KOGAKU KK44 citations92
US4472738ASep 18, 1984
Pattern testing apparatus
NIPPON KOGAKU KK8 citations73
US4685805AAug 11, 1987
Small gap measuring apparatus
NIPPON KOGAKU KK1 citations48
US4537501AAug 27, 1985
Apparatus for the attitude control of plate-form body
NIPPON KOGAKU KK0 citations40
NIKON CORP
6 patentsUS5500736AMar 19, 1996
Method of detecting positions
NIKON CORP473 citations98
US5486896AJan 23, 1996
Exposure apparatus
NIKON CORP80 citations95
US5191374AMar 2, 1993
Exposure control apparatus
NIKON CORP104 citations95
US6583854B1Jun 24, 2003
Method and apparatus for the manufacture of circuits for a large display device using stitch exposure
NIKON CORP32 citations92
US5640243AJun 17, 1997
Position detection method
NIKON CORP25 citations91
US6211965B1Apr 3, 2001
Photolithographic position measuring laser interferometer with relitively moving measuring intereometer
NIKON CORP15 citations84