Inventor
KIUCHI TOHRU
JP38 patents
⚠️ This page may combine multiple inventors who share the name “KIUCHI TOHRU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
20 patentsUS5883704AMar 16, 1999
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system
NIKON CORP183 citations99
US7433019B2Oct 7, 2008
Exposure apparatus and device manufacturing method
NIKON CORP66 citations98
US5583609ADec 10, 1996
Projection exposure apparatus
NIKON CORP92 citations96
US7573052B2Aug 11, 2009
Exposure apparatus, exposure method, and device manufacturing method
NIKON CORP24 citations92
US6583854B1Jun 24, 2003
Method and apparatus for the manufacture of circuits for a large display device using stitch exposure
NIKON CORP32 citations92
US5872618AFeb 16, 1999
Projection exposure apparatus
NIKON CORP22 citations92
US7872730B2Jan 18, 2011
Immersion exposure apparatus and immersion exposure method, and device manufacturing method
NIKON CORP7 citations84
US9072210B2Jun 30, 2015
Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
NIKON CORP2 citations63
US8013975B2Sep 6, 2011
Exposure apparatus, exposure method, and method for producing device
NIKON CORP4 citations63
US11073767B2Jul 27, 2021
Substrate processing apparatus, processing apparatus, and method for manufacturing device
NIKON CORP0 citations62
US8384875B2Feb 26, 2013
Exposure apparatus, exposure method, and method for producing device
NIKON CORP4 citations62
US11342206B2May 24, 2022
Substrate case and substrate accommodation apparatus
NIKON CORP0 citations59
US10691027B2Jun 23, 2020
Substrate processing apparatus, processing apparatus, and method for manufacturing device
NIKON CORP0 citations52
US10591827B2Mar 17, 2020
Substrate processing apparatus, processing apparatus, and method for manufacturing device
NIKON CORP0 citations52
US10527945B2Jan 7, 2020
Substrate processing apparatus, processing apparatus, and method for manufacturing device
NIKON CORP0 citations52
US10156795B2Dec 18, 2018
Substrate processing apparatus, processing apparatus, and method for manufacturing device
NIKON CORP0 citations52
US10007190B2Jun 26, 2018
Substrate processing apparatus, processing apparatus, and method for manufacturing device
NIKON CORP0 citations52
US9651868B2May 16, 2017
Substrate processing apparatus, processing apparatus, and method for manufacturing device
NIKON CORP0 citations52
US8379186B2Feb 19, 2013
Pattern formation apparatus, pattern formation method, and device manufacturing method
NIKON CORP0 citations42
US8040490B2Oct 18, 2011
Liquid immersion exposure apparatus, exposure method, and method for producing device
NIKON CORP0 citations42
KIUCHI TOHRU
11 patentsUS8235695B2Aug 7, 2012
Pattern forming device, pattern forming method, and device manufacturing method
KIUCHI TOHRU6 citations84
US8440375B2May 14, 2013
Exposure method and electronic device manufacturing method
KIUCHI TOHRU5 citations73
US8801307B2Aug 12, 2014
Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
KIUCHI TOHRU2 citations62
US8399263B2Mar 19, 2013
Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate
KIUCHI TOHRU2 citations62
US8289500B2Oct 16, 2012
Exposure apparatus, exposure method, and device manufacturing method
KIUCHI TOHRU2 citations62
US9152062B2Oct 6, 2015
Pattern forming device, pattern forming method, and device manufacturing method
KIUCHI TOHRU0 citations52
US8264666B2Sep 11, 2012
Exposure apparatus, exposure method, and method of manufacturing device
KIUCHI TOHRU0 citations52
US8922748B2Dec 30, 2014
Exposure apparatus, exposure method, and device manufacturing method
KIUCHI TOHRU0 citations51
US8743341B2Jun 3, 2014
Immersion exposure apparatus and immersion exposure method, and device manufacturing method
KIUCHI TOHRU0 citations51
US8508714B2Aug 13, 2013
Exposure apparatus, exposure method, and method for producing device
KIUCHI TOHRU0 citations41
US8780326B2Jul 15, 2014
Exposure apparatus, exposure method, and device manufacturing method
KIUCHI TOHRU0 citations40