Inventor

HALLER UWE PAUL

US2 patents

⚠️ This page may combine multiple inventors who share the name “HALLER UWE PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US8772682B2Jul 8, 2014

Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber

APPLIED MATERIALS INC46 citations94

AMBAL HARI KISHORE

1 patent

US8552346B2Oct 8, 2013

Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber

AMBAL HARI KISHORE27 citations86