Inventor
EDA MASAICHI
US7 patents
⚠️ This page may combine multiple inventors who share the name “EDA MASAICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
6 patentsUS6686272B1Feb 3, 2004
Anti-reflective coatings for use at 248 nm and 193 nm
LSI LOGIC CORP20 citations91
US6794304B1Sep 21, 2004
Method and apparatus for reducing microtrenching for borderless vias created in a dual damascene process
LSI LOGIC CORP22 citations90
US6713386B1Mar 30, 2004
Method of preventing resist poisoning in dual damascene structures
LSI LOGIC CORP17 citations89
US6743725B1Jun 1, 2004
High selectivity SiC etch in integrated circuit fabrication
LSI LOGIC CORP18 citations81
US6969683B2Nov 29, 2005
Method of preventing resist poisoning in dual damascene structures
LSI LOGIC CORP3 citations60
US7094687B1Aug 22, 2006
Reduced dry etching lag
LSI LOGIC CORP1 citations49