Inventor
TAKIKAWA HIROAKI
JP4 patents
⚠️ This page may combine multiple inventors who share the name “TAKIKAWA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
3 patentsUS6686272B1Feb 3, 2004
Anti-reflective coatings for use at 248 nm and 193 nm
LSI LOGIC CORP20 citations91
US6713386B1Mar 30, 2004
Method of preventing resist poisoning in dual damascene structures
LSI LOGIC CORP17 citations89
US6969683B2Nov 29, 2005
Method of preventing resist poisoning in dual damascene structures
LSI LOGIC CORP3 citations60