Inventor
KIM YONGBAE
US3 patents
Patents
3 patentsUS6686272B1Feb 3, 2004
Anti-reflective coatings for use at 248 nm and 193 nm
LSI LOGIC CORP20 citations91
US6713386B1Mar 30, 2004
Method of preventing resist poisoning in dual damascene structures
LSI LOGIC CORP17 citations89
US6969683B2Nov 29, 2005
Method of preventing resist poisoning in dual damascene structures
LSI LOGIC CORP3 citations60