Inventor
FANTON JEFFREY T
US26 patents
⚠️ This page may combine multiple inventors who share the name “FANTON JEFFREY T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
THERMA WAVE INC
18 patentsUS5900939AMay 4, 1999
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC174 citations99
US5798837AAug 25, 1998
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC233 citations99
US5596411AJan 21, 1997
Integrated spectroscopic ellipsometer
THERMA WAVE INC205 citations99
US5181080AJan 19, 1993
Method and apparatus for evaluating the thickness of thin films
THERMA WAVE INC291 citations99
US6934025B2Aug 23, 2005
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC30 citations96
US6515746B2Feb 4, 2003
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC42 citations96
US6411385B2Jun 25, 2002
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC54 citations96
US6304326B1Oct 16, 2001
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC72 citations96
US7106446B2Sep 12, 2006
Modulated reflectance measurement system with multiple wavelengths
THERMA WAVE INC18 citations92
US6744850B2Jun 1, 2004
X-ray reflectance measurement system with adjustable resolution
THERMA WAVE INC35 citations92
US7061614B2Jun 13, 2006
Measurement system with separate optimized beam paths
THERMA WAVE INC43 citations91
US7054006B2May 30, 2006
Self-calibrating beam profile ellipsometer
THERMA WAVE INC14 citations84
US6753962B2Jun 22, 2004
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC12 citations82
US7116424B2Oct 3, 2006
Modulated reflectance measurement system with multiple wavelengths
THERMA WAVE INC9 citations74
US7079249B2Jul 18, 2006
Modulated reflectance measurement system with fiber laser technology
THERMA WAVE INC9 citations74
US7227637B2Jun 5, 2007
Measurement system with separate optimized beam paths
THERMA WAVE INC6 citations72
US6885019B2Apr 26, 2005
Sample positioning system to improve edge measurements
THERMA WAVE INC2 citations62
US6707056B2Mar 16, 2004
Stage rotation system to improve edge measurements
THERMA WAVE INC3 citations62
NOVA MEASURING INSTR INC
3 patentsUS10859519B2Dec 8, 2020
Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)
NOVA MEASURING INSTR INC3 citations83
US10481112B2Nov 19, 2019
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
NOVA MEASURING INSTR INC4 citations83
US10119925B2Nov 6, 2018
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
NOVA MEASURING INSTR INC7 citations83