Inventor
UHRICH CRAIG
US8 patents
Patents
8 patentsUS6934025B2Aug 23, 2005
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC30 citations96
US6515746B2Feb 4, 2003
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC42 citations96
US6744850B2Jun 1, 2004
X-ray reflectance measurement system with adjustable resolution
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US6829049B1Dec 7, 2004
Small spot spectroscopic ellipsometer with refractive focusing
THERMA WAVE INC14 citations82
US6753962B2Jun 22, 2004
Thin film optical measurement system and method with calibrating ellipsometer
THERMA WAVE INC12 citations82
US6940596B2Sep 6, 2005
Refractive focusing element for spectroscopic ellipsometry
THERMA WAVE INC7 citations72
US6885019B2Apr 26, 2005
Sample positioning system to improve edge measurements
THERMA WAVE INC2 citations62
US6707056B2Mar 16, 2004
Stage rotation system to improve edge measurements
THERMA WAVE INC3 citations62