P

Inventor

GOLDSTEIN MICHAEL

US72 patents
⚠️ This page may combine multiple inventors who share the name “GOLDSTEIN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INTEL CORP

29 patents
US5494439AFeb 27, 1996

Si/SiC composite material and method for making Si/SiC composite material

INTEL CORP396 citations96
US7199936B2Apr 3, 2007

Method and apparatus for polarizing electromagnetic radiation

INTEL CORP23 citations93
US6522465B1Feb 18, 2003

Transmitting spectral filtering of high power extreme ultra-violet radiation

INTEL CORP41 citations93
US7501641B2Mar 10, 2009

Dual hemispherical collectors

INTEL CORP16 citations92
US7635503B2Dec 22, 2009

Composite metal films and carbon nanotube fabrication

INTEL CORP16 citations84
US6846086B2Jan 25, 2005

Mirror assembly with thermal contour control

INTEL CORP15 citations84
US6816648B2Nov 9, 2004

Integrated waveguide gratings by ion implantation

INTEL CORP14 citations84
US5417803AMay 23, 1995

Method for making Si/SiC composite material

INTEL CORP17 citations79
US7666555B2Feb 23, 2010

Pellicle, methods of fabrication and methods of use for extreme ultraviolet lithography

INTEL CORP14 citations77
US7167295B2Jan 23, 2007

Method and apparatus for polarizing electromagnetic radiation

INTEL CORP6 citations74
US7070832B2Jul 4, 2006

Sublimating process for cleaning and protecting lithography masks

INTEL CORP8 citations74
US7002164B2Feb 21, 2006

Source multiplexing in lithography

INTEL CORP9 citations74
US6801298B2Oct 5, 2004

Light condenser

INTEL CORP5 citations74
US6730615B2May 4, 2004

High reflector tunable stress coating, such as for a MEMS mirror

INTEL CORP6 citations74
US6707602B2Mar 16, 2004

Reflective spectral filtering of high power extreme ultra-violet radiation

INTEL CORP5 citations74
US6671054B2Dec 30, 2003

Interferometric patterning for lithography

INTEL CORP6 citations74
US6577442B2Jun 10, 2003

Reflective spectral filtering of high power extreme ultra-violet radiation

INTEL CORP6 citations74
US6611387B1Aug 26, 2003

Adjustment of the partial coherence of the light energy in an imaging system

INTEL CORP6 citations69
US6490031B1Dec 3, 2002

Radiometric scatter monitor

INTEL CORP7 citations66
US7760431B2Jul 20, 2010

Method of and apparatus for modifying polarity of light

INTEL CORP2 citations63
US7522335B2Apr 21, 2009

Broad-angle multilayer mirror design

INTEL CORP3 citations63
US7420264B2Sep 2, 2008

High reflector tunable stress coating, such as for a MEMS mirror

INTEL CORP1 citations63
US7237914B2Jul 3, 2007

Light condenser

INTEL CORP2 citations63
US7183565B2Feb 27, 2007

Source multiplexing in lithography

INTEL CORP3 citations63
US7057262B2Jun 6, 2006

High reflector tunable stress coating, such as for a MEMS mirror

INTEL CORP2 citations63
US7034320B2Apr 25, 2006

Dual hemispherical collectors

INTEL CORP4 citations63
US7022443B2Apr 4, 2006

Compensation of reflective mask effects in lithography systems

INTEL CORP4 citations63
US6903354B2Jun 7, 2005

Extreme ultraviolet transition oscillator

INTEL CORP4 citations63
US6884361B2Apr 26, 2005

Method for making a mirror for photolithography

INTEL CORP4 citations63

OCULAR THERAPEUTIX INC

8 patents

MAG EH LTD

3 patents

VISIONSENSE LTD

2 patents

GOLDSTEIN MICHAEL

2 patents

SCHECHTERMAN MARK

2 patents

UPTAKE TECH INC

1 patent

SCITEX CORP LTD

1 patent

SONY CORP

1 patent

ADVANCED VISION TECH LTD

1 patent

Showing the top 50 of 72 patents by PatentIndex Score.