Inventor
PNINI BOAZ
DE5 patents
⚠️ This page may combine multiple inventors who share the name “PNINI BOAZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
4 patentsUS12572081B2Mar 10, 2026
Optical system and projection exposure apparatus
ZEISS CARL SMT GMBH0 citations55
US12504698B2Dec 23, 2025
Mounting for a lithography system, and lithography system
ZEISS CARL SMT GMBH0 citations55
US11320749B2May 3, 2022
Actuator device for aligning an element, projection exposure apparatus for semiconductor lithography, and method for aligning an element
ZEISS CARL SMT GMBH0 citations55
US11460780B2Oct 4, 2022
Method for adusting a first element of a lithography apparatus towards a second element of a lithography apparatus by a tunable spacer
ZEISS CARL SMT GMBH0 citations44