Inventor

PRIWISCH MARTIN

KR3 patents

Patents

3 patents

US11946881B2Apr 2, 2024

Inspection apparatus and inspection method using same

SAMSUNG ELECTRONICS CO LTD0 citations56

US12474393B2Nov 18, 2025

Terahertz probe

SAMSUNG ELECTRONICS CO LTD0 citations55

US12196669B2Jan 14, 2025

Inspection apparatus and method of inspecting wafer

SAMSUNG ELECTRONICS CO LTD0 citations46