Inventor
KELLER NICHOLAS JAMES
US6 patents
⚠️ This page may combine multiple inventors who share the name “KELLER NICHOLAS JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONTO INNOVATION INC
5 patentsUS11808715B2Nov 7, 2023
Target for optical measurement of trenches
ONTO INNOVATION INC2 citations70
US11079220B1Aug 3, 2021
Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonance
ONTO INNOVATION INC2 citations67
US12386271B2Aug 12, 2025
Multi-layer calibration for empirical overlay measurement
ONTO INNOVATION INC1 citations55
US12013350B2Jun 18, 2024
Effective cell approximation model for logic structures
ONTO INNOVATION INC0 citations55
US11668644B2Jun 6, 2023
Opto-acoustic measurement of a transparent film stack
ONTO INNOVATION INC0 citations45