Inventor

FUWA KOH

JP5 patents

⚠️ This page may combine multiple inventors who share the name “FUWA KOH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOTO LTD

2 patents

US6768627B1Jul 27, 2004

Electrostatic chuck and processing apparatus for insulative substrate

TOTO LTD63 citations93

US7209339B2Apr 24, 2007

Electrostatic chuck for an electrically insulative substrate, and a method of using same

TOTO LTD30 citations90

ULVAC INC

2 patents

US10568607B2Feb 25, 2020

Device, method of manufacturing the device, and method of manufacturing array type of ultrasound probe

ULVAC INC0 citations48

US10982323B2Apr 20, 2021

Conductive thin film manufacturing method

ULVAC INC0 citations41

ULVAC CORP

1 patent

US6781812B2Aug 24, 2004

Chuck equipment

ULVAC CORP44 citations89