Inventor
MIYAGAKI JUNJI
JP2 patents
Patents
2 patentsUS7413832B2Aug 19, 2008
Method of producing a glass substrate for a mask blank, method of producing a mask blank, and method of producing a transfer mask
HOYA CORP17 citations87
US7732101B2Jun 8, 2010
Method of producing a glass substrate for a mask blank by polishing with an alkaline polishing liquid that contains colloidal silica abrasive grains
HOYA CORP7 citations68