Inventor
KWAN YIM BUN P
NL14 patents
⚠️ This page may combine multiple inventors who share the name “KWAN YIM BUN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS6449030B1Sep 10, 2002
Balanced positioning system for use lithographic apparatus
ASML NETHERLANDS BV114 citations98
US6525803B2Feb 25, 2003
Balanced positioning system for use in lithographic apparatus
ASML NETHERLANDS BV46 citations93
US6671036B2Dec 30, 2003
Balanced positioning system for use in lithographic apparatus
ASML NETHERLANDS BV19 citations92
US6542220B1Apr 1, 2003
Purge gas systems for use in lithographic projection apparatus
ASML NETHERLANDS BV92 citations92
US6852989B2Feb 8, 2005
Positioning system for use in lithographic apparatus
ASML NETHERLANDS BV18 citations89
US6635887B2Oct 21, 2003
Positioning system for use in lithographic apparatus
ASML NETHERLANDS BV44 citations89
US6657204B2Dec 2, 2003
Cooling of voice coil motors in lithographic projection apparatus
ASML NETHERLANDS BV19 citations88
US6498350B2Dec 24, 2002
Crash prevention in positioning apparatus for use in lithographic projection apparatus
ASML NETHERLANDS BV32 citations88
US6509951B2Jan 21, 2003
Lithographic projection apparatus having a temperature controlled heat shield
ASML NETHERLANDS BV31 citations86
US7034920B2Apr 25, 2006
Balanced positioning system for use in lithographic apparatus
ASML NETHERLANDS BV11 citations81
US7057313B2Jun 6, 2006
Cooling of voice coil motors
ASML NETHERLANDS BV10 citations69
US6924882B2Aug 2, 2005
Balanced positioning system for use in lithographic apparatus
ASML NETHERLANDS BV3 citations62
US7202937B2Apr 10, 2007
Balanced positioning system for use in lithographic apparatus
ASML NETHERLANDS BV2 citations60