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Inventor
VELDHUIS GERJAN P
NL
4 patents
⚠️ This page may combine multiple inventors who share the name “VELDHUIS GERJAN P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM LITHOGRAPHY BV
2 patents
US6262796B1
Jul 17, 2001
Positioning device having two object holders
ASM LITHOGRAPHY BV
634 citations
96
US5969441A
Oct 19, 1999
Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device
ASM LITHOGRAPHY BV
1,609 citations
95
ASML NETHERLANDS BV
2 patents
US6852989B2
Feb 8, 2005
Positioning system for use in lithographic apparatus
ASML NETHERLANDS BV
18 citations
89
US6635887B2
Oct 21, 2003
Positioning system for use in lithographic apparatus
ASML NETHERLANDS BV
44 citations
89