Inventor
YAMAKAWA MASAKO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YAMAKAWA MASAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI GAS CHEMICAL CO
4 patentsUS10377734B2Aug 13, 2019
Resist composition, method for forming resist pattern, polyphenol derivative for use in the composition
MITSUBISHI GAS CHEMICAL CO7 citations83
US9908831B2Mar 6, 2018
Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom
MITSUBISHI GAS CHEMICAL CO11 citations83
US9540339B2Jan 10, 2017
Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom
MITSUBISHI GAS CHEMICAL CO10 citations83
US9182666B2Nov 10, 2015
Cyclic compound, method for producing the same, radiation-sensitive composition, and resist pattern formation method
MITSUBISHI GAS CHEMICAL CO3 citations61
ECHIGO MASATOSHI
2 patentsUS9122153B2Sep 1, 2015
Cyclic compound, method for producing same, composition, and method for forming resist pattern
ECHIGO MASATOSHI18 citations82
US9598392B2Mar 21, 2017
Resist composition, method for forming resist pattern, polyphenolic compound for use in the composition, and alcoholic compound that can be derived therefrom
ECHIGO MASATOSHI0 citations51