Inventor

YEO JAE-HYUN

KR22 patents

⚠️ This page may combine multiple inventors who share the name “YEO JAE-HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YEO JAE-HYUN

SAMSUNG ELECTRONICS CO LTD

Dielectric structures having high dielectric constants, and non-volatile semiconductor memory devices having the dielectric structures

Methods of forming atomic layers of a material on a substrate by sequentially introducing precursors of the material

Method of forming oxide layer using atomic layer deposition method and method of forming capacitor of semiconductor device using the same

Method of forming material using atomic layer deposition and method of forming capacitor of semiconductor device using the same

Semiconductor device and method for manufacturing the same

Capacitor of semiconductor memory device that has composite Al2O3/HfO2 dielectric layer and method of manufacturing the same

Semiconductor capacitors having tantalum oxide layers and methods for manufacturing the same

Semiconductor capacitors having tantalum oxide layers

Methods of forming capacitor structures having aluminum oxide diffusion barriers

Methods and apparatus for forming thin films for semiconductor devices

High performance MIS capacitor with HfO2 dielectric

Method manufacturing capacitor dielectric

Method of forming material using atomic layer deposition and method of forming capacitor of semiconductor device using the same

Methods of manufacturing a semiconductor device

Method of forming a thin film, method of manufacturing a gate structure using the same and method of manufacturing a capacitor using the same

Capacitor of semiconductor device and method of fabricating the same

Dielectric layer, method of manufacturing the dielectric layer and method of manufacturing capacitor using the same

Semiconductor devices having dielectric layers and methods of forming the same

Method for manufacturing a semiconductor device

Methods of forming an integrated circuit capacitor in which a metal preprocessed layer is formed on an electrode thereof

Method of forming a dielectric structure having a high dielectric constant and method of manufacturing a semiconductor device having the dielectric structure

KIM KIL-CHUL

Methods of fabricating semiconductor devices including multilayer dielectric layers