Inventor

MEHENDALE MANJUSHA

US8 patents

⚠️ This page may combine multiple inventors who share the name “MEHENDALE MANJUSHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ONTO INNOVATION INC

3 patents

US11988641B2May 21, 2024

Characterization of patterned structures using acoustic metrology

ONTO INNOVATION INC0 citations59

US12092565B2Sep 17, 2024

Non-destructive inspection and manufacturing metrology systems and methods

ONTO INNOVATION INC0 citations54

US12474643B2Nov 18, 2025

System and method for performing alignment and overlay measurement through an opaque layer

ONTO INNOVATION INC0 citations53

MEHENDALE MANJUSHA

2 patents

US9140601B2Sep 22, 2015

Position sensitive detection optimization

MEHENDALE MANJUSHA4 citations67

US9991176B2Jun 5, 2018

Non-destructive acoustic metrology for void detection

MEHENDALE MANJUSHA3 citations64

RUDOLPH TECH INC

1 patent

US9576862B2Feb 21, 2017

Optical acoustic substrate assessment system and method

RUDOLPH TECH INC8 citations81

CA NAT RESEARCH COUNCIL

1 patent

US6884960B2Apr 26, 2005

Methods for creating optical structures in dielectrics using controlled energy deposition

CA NAT RESEARCH COUNCIL13 citations78

RUDOLPH TECHNOLOGIES INC

1 patent

US7903238B2Mar 8, 2011

Combination of ellipsometry and optical stress generation and detection

RUDOLPH TECHNOLOGIES INC0 citations31