Inventor

HOLLAND KAREY L

US4 patents

⚠️ This page may combine multiple inventors who share the name “HOLLAND KAREY L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents

US4786360ANov 22, 1988

LSI LOGIC CORP

1 patent

US6234883B1May 22, 2001

Method and apparatus for concurrent pad conditioning and wafer buff in chemical mechanical polishing

LSI LOGIC CORP16 citations82

HOLLAND KAREY L

IBM

Anisotropic etch process for tungsten metallurgy

Etching metal films with complexing chloride plasma

Tailoring of via-hole sidewall slope

LSI LOGIC CORP

Method and apparatus for concurrent pad conditioning and wafer buff in chemical mechanical polishing