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Inventor
HERRMANN STEVE
US
3 patents
⚠️ This page may combine multiple inventors who share the name “HERRMANN STEVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AUGUST TECHNOLOGY CORP
1 patent
US6937753B1
Aug 30, 2005
Automated wafer defect inspection system and a process of performing such inspection
AUGUST TECHNOLOGY CORP
96 citations
96
RUDOLPH TECHNOLOGIES INC
1 patent
US7316938B2
Jan 8, 2008
Adjustable film frame aligner
RUDOLPH TECHNOLOGIES INC
5 citations
68
HERRMANN STEVE
1 patent
US8097966B2
Jan 17, 2012
Adjustable film frame aligner
HERRMANN STEVE
2 citations
51