Inventor
WALLACE JAY
US12 patents
⚠️ This page may combine multiple inventors who share the name “WALLACE JAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7651583B2Jan 26, 2010
Processing system and method for treating a substrate
TOKYO ELECTRON LTD558 citations97
US6951821B2Oct 4, 2005
Processing system and method for chemically treating a substrate
TOKYO ELECTRON LTD306 citations97
US7079760B2Jul 18, 2006
Processing system and method for thermally treating a substrate
TOKYO ELECTRON LTD61 citations94
US7029536B2Apr 18, 2006
Processing system and method for treating a substrate
TOKYO ELECTRON LTD49 citations94
US7214274B2May 8, 2007
Method and apparatus for thermally insulating adjacent temperature controlled processing chambers
TOKYO ELECTRON LTD22 citations92
US7462564B2Dec 9, 2008
Processing system and method for treating a substrate
TOKYO ELECTRON LTD18 citations91
US7964058B2Jun 21, 2011
Processing system and method for chemically treating a substrate
TOKYO ELECTRON LTD13 citations83
US7461614B2Dec 9, 2008
Method and apparatus for improved baffle plate
TOKYO ELECTRON LTD16 citations83
US7462243B2Dec 9, 2008
Chemical processing system and method
TOKYO ELECTRON LTD13 citations82
US7083161B2Aug 1, 2006
Method and apparatus for providing vacuum isolation
TOKYO ELECTRON LTD2 citations62