Inventor
LAFLAMME JR ARTHUR
US4 patents
Patents
4 patentsUS6951821B2Oct 4, 2005
Processing system and method for chemically treating a substrate
TOKYO ELECTRON LTD306 citations97
US7079760B2Jul 18, 2006
Processing system and method for thermally treating a substrate
TOKYO ELECTRON LTD61 citations94
US7029536B2Apr 18, 2006
Processing system and method for treating a substrate
TOKYO ELECTRON LTD49 citations94
US7462564B2Dec 9, 2008
Processing system and method for treating a substrate
TOKYO ELECTRON LTD18 citations91