Inventor

TSENG TA-SHAN

TW6 patents

⚠️ This page may combine multiple inventors who share the name “TSENG TA-SHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

5 patents

US6117345ASep 12, 2000

High density plasma chemical vapor deposition process

UNITED MICROELECTRONICS CORP44 citations95

US7271101B2Sep 18, 2007

High density plasma chemical vapor deposition process

UNITED MICROELECTRONICS CORP6 citations73

US7078346B2Jul 18, 2006

High density plasma chemical vapor deposition process

UNITED MICROELECTRONICS CORP5 citations73

US7718079B2May 18, 2010

High density plasma chemical vapor deposition process

UNITED MICROELECTRONICS CORP3 citations62

US7514014B1Apr 7, 2009

High density plasma chemical vapor deposition process

UNITED MICROELECTRONICS CORP2 citations59

LIU CHIH-CHIEN

1 patent

US8062536B2Nov 22, 2011

High density plasma chemical vapor deposition process

LIU CHIH-CHIEN20 citations91