Inventor
SHIEH WEN-BIN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “SHIEH WEN-BIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
6 patentsUS6117345ASep 12, 2000
High density plasma chemical vapor deposition process
UNITED MICROELECTRONICS CORP44 citations95
US5656403AAug 12, 1997
Method and template for focus control in lithography process
UNITED MICROELECTRONICS CORP20 citations90
US6636312B1Oct 21, 2003
Multi-pitch vernier for checking alignment accuracy
UNITED MICROELECTRONICS CORP13 citations79
US7271101B2Sep 18, 2007
High density plasma chemical vapor deposition process
UNITED MICROELECTRONICS CORP6 citations73
US7078346B2Jul 18, 2006
High density plasma chemical vapor deposition process
UNITED MICROELECTRONICS CORP5 citations73
US7718079B2May 18, 2010
High density plasma chemical vapor deposition process
UNITED MICROELECTRONICS CORP3 citations62