Inventor

VAN DER LOGT LÉON MARIA ALBERTUS

NL2 patents

Patents

2 patents

US10649342B2May 12, 2020

Method and apparatus for determining a fingerprint of a performance parameter

ASML NETHERLANDS BV2 citations69

US11194258B2Dec 7, 2021

Method and apparatus for determining a fingerprint of a performance parameter

ASML NETHERLANDS BV0 citations59