Inventor
MISHIMA KAZUHIKO
JP27 patents
⚠️ This page may combine multiple inventors who share the name “MISHIMA KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
24 patentsUS9283720B2Mar 15, 2016
Position detection apparatus, imprint apparatus, and position detection method
CANON KK19 citations92
US7019836B2Mar 28, 2006
Position detection method and apparatus, and exposure method and apparatus
CANON KK23 citations92
US6870623B2Mar 22, 2005
Position detection apparatus, alignment apparatus and methods therefor, and exposure apparatus and device manufacturing method
CANON KK20 citations92
US6335784B2Jan 1, 2002
Scan type projection exposure apparatus and device manufacturing method using the same
CANON KK21 citations92
US6151121ANov 21, 2000
Position detecting system and device manufacturing method using the same
CANON KK23 citations92
US5943135AAug 24, 1999
Position detecting method and position detecting system using the same
CANON KK33 citations92
US7298500B2Nov 20, 2007
Position sensor
CANON KK10 citations84
US8922786B2Dec 30, 2014
Detector, imprint apparatus, and article manufacturing method
CANON KK9 citations83
US6930016B2Aug 16, 2005
Position detection apparatus and method, exposure apparatus, and device manufacturing method
CANON KK8 citations74
US7142284B2Nov 28, 2006
Position detector, position detecting method, and exposure apparatus having the same
CANON KK7 citations73
US6707533B2Mar 16, 2004
Detection apparatus and exposure apparatus using the same
CANON KK12 citations73
US9606456B2Mar 28, 2017
Lithography apparatus, determination method, and method of manufacturing article
CANON KK2 citations70
US7551281B2Jun 23, 2009
Position sensor
CANON KK3 citations63
US7450249B2Nov 11, 2008
Position sensor
CANON KK1 citations63
US9400434B2Jul 26, 2016
Exposure apparatus, exposure method, and device manufacturing method
CANON KK2 citations62
US7986396B2Jul 26, 2011
Exposure apparatus
CANON KK3 citations62
US7230706B2Jun 12, 2007
Position detection method and apparatus, and exposure method and apparatus
CANON KK4 citations62
US12307643B2May 20, 2025
Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus
CANON KK0 citations57
US12339595B2Jun 24, 2025
Measurement apparatus, lithography apparatus, and article manufacturing method
CANON KK0 citations56
US9261802B2Feb 16, 2016
Lithography apparatus, alignment method, and method of manufacturing article
CANON KK1 citations52
US9645514B2May 9, 2017
Imprint apparatus, imprint method, and device manufacturing method
CANON KK0 citations51
US9594315B2Mar 14, 2017
Detection apparatus, lithography apparatus and method of manufacturing article
CANON KK0 citations51
US9595447B2Mar 14, 2017
Detection apparatus, imprint apparatus, and method of manufacturing products
CANON KK1 citations51
US9718234B2Aug 1, 2017
Imprint lithography apparatus and device manufacturing method therefor
CANON KK0 citations41