Inventor
INADA HIROMI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “INADA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
10 patentsUS7633064B2Dec 15, 2009
Electric charged particle beam microscopy and electric charged particle beam microscope
HITACHI HIGH TECH CORP11 citations84
US7372051B2May 13, 2008
Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system
HITACHI HIGH TECH CORP19 citations83
USD571385SJun 17, 2008
Electron microscope
HITACHI HIGH TECH CORP11 citations80
US7435957B2Oct 14, 2008
Charged particle beam equipment and charged particle microscopy
HITACHI HIGH TECH CORP8 citations74
US7126120B2Oct 24, 2006
Electron microscope
HITACHI HIGH TECH CORP10 citations73
US9305745B2Apr 5, 2016
Scanning electron microscope
HITACHI HIGH TECH CORP3 citations72
US7372047B2May 13, 2008
Charged particle system and a method for measuring image magnification
HITACHI HIGH TECH CORP2 citations63
US7923701B2Apr 12, 2011
Charged particle beam equipment
HITACHI HIGH TECH CORP4 citations62
US7375330B2May 20, 2008
Charged particle beam equipment
HITACHI HIGH TECH CORP4 citations62
US7649172B2Jan 19, 2010
Charged particle beam equipment with magnification correction
HITACHI HIGH TECH CORP5 citations58
HITACHI LTD
5 patentsUS7544936B2Jun 9, 2009
Method and device for observing a specimen in a field of view of an electron microscope
HITACHI LTD4 citations73
US7164129B2Jan 16, 2007
Method and device for observing a specimen in a field of view of an electron microscope
HITACHI LTD4 citations73
US7022989B2Apr 4, 2006
Method and device for observing a specimen in a field of view of an electron microscope
HITACHI LTD10 citations73
US7012254B2Mar 14, 2006
Method and device for observing a specimen in a field of view of an electron microscope
HITACHI LTD4 citations73
US6878934B2Apr 12, 2005
Method and device for observing a specimen in a field of view of an electron
HITACHI LTD8 citations73