Inventor
FANG WEILEUN
TW22 patents
⚠️ This page may combine multiple inventors who share the name “FANG WEILEUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
WALSIN LIHWA CORP
7 patentsUS6359718B1Mar 19, 2002
Actuating mechanism for rotating micro-mirror
WALSIN LIHWA CORP37 citations92
US7247247B2Jul 24, 2007
Selective etching method
WALSIN LIHWA CORP10 citations81
US7088030B2Aug 8, 2006
High-aspect-ratio-microstructure (HARM)
WALSIN LIHWA CORP7 citations70
US8030111B2Oct 4, 2011
Integration manufacturing process for MEMS device
WALSIN LIHWA CORP2 citations60
US6949396B2Sep 27, 2005
Corner compensation method for fabricating MEMS and structure thereof
WALSIN LIHWA CORP2 citations60
US7196449B2Mar 27, 2007
Two-axis device and manufacturing method therefor
WALSIN LIHWA CORP0 citations50
US7180144B2Feb 20, 2007
Corner compensation method for fabricating MEMS and structure thereof
WALSIN LIHWA CORP1 citations50