P
PatentIndex
Search
Landscape
Sign in
Inventor
KLIPPERT II WALTER E
US
2 patents
Patents
2 patents
US6270622B1
Aug 7, 2001
Method and apparatus for improving accuracy of plasma etching process
LAM RES CORP
23 citations
86
US6136712A
Oct 24, 2000
Method and apparatus for improving accuracy of plasma etching process
LAM RES CORP
28 citations
86