Inventor

HOHL GEORG-FRIEDRICH

DE2 patents

Patents

2 patents

US6503335B2Jan 7, 2003

Centrifuge and method for centrifuging a semiconductor wafer

WACKER SILTRONIC HALBLEITERMAT25 citations86

US6412500B1Jul 2, 2002

Device and method for cleaning semiconductor wafers

WACKER SILTRONIC HALBLEITERMAT11 citations68