Inventor
ALPAY HAKKI U
US4 patents
⚠️ This page may combine multiple inventors who share the name “ALPAY HAKKI U”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DU PONT
3 patentsUS5415953AMay 16, 1995
Photomask blanks comprising transmissive embedded phase shifter
DU PONT44 citations89
US5230971AJul 27, 1993
Photomask blank and process for making a photomask blank using gradual compositional transition between strata
DU PONT37 citations89
US5459002AOct 17, 1995
Photomask blanks
DU PONT8 citations70