Inventor
MARQUEZ JOHNATHAN
US3 patents
Patents
3 patentsUS11061338B2Jul 13, 2021
High-resolution position encoder with image sensor and encoded target pattern
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US10578977B2Mar 3, 2020
On-board supply system for a stage assembly
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US9904178B2Feb 27, 2018
On-board supply system for a stage assembly
NIKON CORP0 citations46