Inventor
BROWN NATHAN R
US19 patents
⚠️ This page may combine multiple inventors who share the name “BROWN NATHAN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
10 patentsUS7059937B2Jun 13, 2006
Systems including differential pressure application apparatus
MICRON TECHNOLOGY INC26 citations96
US6899607B2May 31, 2005
Polishing systems for use with semiconductor substrates including differential pressure application apparatus
MICRON TECHNOLOGY INC48 citations96
US6863771B2Mar 8, 2005
Differential pressure application apparatus for use in polishing layers of semiconductor device structures and methods
MICRON TECHNOLOGY INC34 citations96
US6881134B2Apr 19, 2005
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane
MICRON TECHNOLOGY INC12 citations92
US7285037B2Oct 23, 2007
Systems including differential pressure application apparatus
MICRON TECHNOLOGY INC7 citations73
US7066791B2Jun 27, 2006
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane
MICRON TECHNOLOGY INC5 citations73
US6872131B2Mar 29, 2005
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane
MICRON TECHNOLOGY INC4 citations73
US6869345B2Mar 22, 2005
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane
MICRON TECHNOLOGY INC5 citations73
US6852017B2Feb 8, 2005
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane
MICRON TECHNOLOGY INC5 citations73
US6722963B1Apr 20, 2004
Apparatus for chemical-mechanical planarization of microelectronic substrates with a carrier and membrane
MICRON TECHNOLOGY INC5 citations73
ROUND ROCK RES LLC
2 patentsUS7947190B2May 24, 2011
Methods for polishing semiconductor device structures by differentially applying pressure to substrates that carry the semiconductor device structures
ROUND ROCK RES LLC12 citations92
US7935216B2May 3, 2011
Differential pressure application apparatus for use in polishing layers of semiconductor device structures and methods
ROUND ROCK RES LLC4 citations73