Inventor
KIM TEGI
JP4 patents
Patents
4 patentsUS11473211B2Oct 18, 2022
Method of estimating oxygen concentration of silicon single crystal and method of manufacturing silicon single crystal
SUMCO CORP2 citations67
US9903044B2Feb 27, 2018
Silicon single crystal producing method
SUMCO CORP1 citations48
US10526728B2Jan 7, 2020
Silicon wafer and method for manufacturing same
SUMCO CORP0 citations45
US10711368B2Jul 14, 2020
Method for producing silicon single crystal
SUMCO CORP0 citations44